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Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials. Topics included: * techniques for compound semiconductor growth * metalorganic precursors for III-V MOVPE * metalorganic precursors for II-VI MOVPE * single-source precursors * chemical beam epitaxy * atomic layer epitaxy Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.

The production of high-purity ceramic materials from low-molecular weight, inorganic or organoelement precursors is a topic of increasing relevance within materials science. With this emerging technology it is possible to precisely tailor the properties of the ceramic material which enables new high-temperature or electronic applications. Every materials scientist and engineer involved in the research and development of new high-performance ceramic materials will find these results – presented at a recent workshop of the Max-Planck-Gesellschaft – of great importance for his own work.