Vacuum Microelectronics
Автор: Wei Zhu
Год издания: 0000
Expert coverage of vacuum microelectronics-principles, devices, and applications The field of vacuum microelectronics has advanced so swiftly that commercial devices are being fabricated, and applications are being developed in displays, wireless communications, spacecraft, and electronics for use in harsh environments. It is a rapidly evolving, interdisciplinary field encompassing electrical engineering, materials science, vacuum engineering, and applied physics. This book surveys the fundamentals, technology, and device applications of this nascent field. Editor Wei Zhu brings together some of the world's foremost experts to provide comprehensive and in-depth coverage of the entire spectrum of vacuum microelectronics. Topics include: Field emission theory Metal and silicon field emitter arrays Novel cold cathode materials Field emission flat panel displays Cold cathode microwave devices Vacuum Microelectronics is intended for practitioners in the display, microwave, telecommunications, and microelectronics industries and in government and university research laboratories, as well as for graduate students majoring in electrical engineering, materials science, and physics. It provides cutting-edge, expert coverage of the subject and serves as both an introductory text and a professional reference.
Theory and Practice of Making Foils By Vacuum Deposition
Автор: Ulanovskiy I. B.
Год издания:
This book is the first attempt ever to offer a consistent review of the main stages of a new way to produce foil from metals and alloys through vacuum deposition; the author has created physical models adequately describing this process and enabling engineering calculations of its basic parameters. The results of this study have laid a scientific foundation for the development of commercial scale process of making ultrathin foils, including those from difficult-to-form titanium alloys, as well as for the development of vacuum engineering devices working something of semiconductors. This book aims to draw the attention of materials science experts, students and postgraduate students of technical universities.
Understanding Microelectronics. A Top-Down Approach
Автор: Franco Maloberti
Год издания:
The microelectronics evolution has given rise to many modern benefits but has also changed design methods and attitudes to learning. Technology advancements shifted focus from simple circuits to complex systems with major attention to high-level descriptions. The design methods moved from a bottom-up to a top-down approach. For today’s students, the most beneficial approach to learning is this top-down method that demonstrates a global view of electronics before going into specifics. Franco Maloberti uses this approach to explain the fundamentals of electronics, such as processing functions, signals and their properties. Here he presents a helpful balance of theory, examples, and verification of results, while keeping mathematics and signal processing theory to a minimum. Key features: Presents a new learning approach that will greatly improve students’ ability to retain key concepts in electronics studies Match the evolution of Computer Aided Design (CAD) which focuses increasingly on high-level design Covers sub-functions as well as basic circuits and basic components Provides real-world examples to inspire a thorough understanding of global issues, before going into the detail of components and devices Discusses power conversion and management; an important area that is missing in other books on the subject End-of-chapter problems and self-training sections support the reader in exploring systems and understanding them at increasing levels of complexity A supporting website (http://www.wiley.com/WileyCDA/WileyTitle/productCd-047074555X,descCd-relatedWebsites.html) presents the interactive student lab, ElvisLAB, where students can conduct virtual experiments on circuits together with PowerPoint slides for lecturers. Inside this book you will find a complete explanation of electronics that can be applied across a range of disciplines including electrical engineering and physics. This comprehensive introduction will be of benefit to students studying electronics, as well as their lecturers and professors. Postgraduate engineers, those in vocational training, and design and application engineers will also find this book useful.
Troubleshooting Vacuum Systems. Steam Turbine Surface Condensers and Refinery Vacuum Towers
Автор: Norman Lieberman P.
Год издания:
Vacuum systems are in wide spread use in the petrochemical plants, petroleum refineries and power generation plants. The existing texts on this subject are theoretical in nature and only deal with how the equipment functions when in good mechanical conditions, from the viewpoint of the equipment vendor. In this much-anticipated volume, one of the most well-respected and prolific process engineers in the world takes on troubleshooting vacuum systems, and especially steam ejectors, an extremely complex and difficult subject that greatly effects the profitability of the majority of the world's refineries.
Roll-to-Roll Vacuum Deposition of Barrier Coatings
Автор: Charles Bishop A.
Год издания:
It is intended that the book will be a practical guide to provide any reader with the basic information to help them understand what is necessary in order to produce a good barrier coated web or to improve the quality of any existing barrier product. After providing an introduction, where the terminology is outlined and some of the science is given (keeping the mathematics to a minimum), including barrier testing methods, the vacuum deposition process will be described. In theory a thin layer of metal or glass-like material should be enough to convert any polymer film into a perfect barrier material. The reality is that all barrier coatings have their performance limited by the defects in the coating. This book looks at the whole process from the source materials through to the post deposition handling of the coated material. This holistic view of the vacuum coating process provides a description of the common sources of defects and includes the possible methods of limiting the defects. This enables readers to decide where their development efforts and money can best be used to improve the barrier performance of their own process or materials. The 2nd edition contains at least 20% new material including additional barrier testing techniques that have been developed and testing and cleaning equipment brought to market since the 1st edition was published in 2010. The topic of adhesion is covered in more detail and there is a section on the Hanson Solubility Parameter which is a method of predicting the solubility of gases or liquids in materials.
Chemistry in Microelectronics
Автор: Yannick Tiec Le
Год издания:
Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, Francois Martin, Jean-Michel Hartmann, Veronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maitrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.