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Principles of Plasma Discharges and Materials Processing

Автор: Michael Lieberman A.

Год издания: 0000

A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Principles and Applications of Electrical Engineering

Автор: Giorgio Rizzoni

Год издания:

Rizzoni is designed for the sophomore/junior level, Introduction to Electrical Engineering course required for non-EE majors. The most widely used book for this course, Rizzoni introduces non-majors to the three basic areas of electrical engineering: circuits, electronics, and electromechanics. The second edition continues the tradition of focusing on the topics and issues of interest to the non-electrical engineering student. To maintain student interest in these topics, Rizzoni provides numerous links between electrical engineering and other engineering fields.